All-in-one Vapour Delivery Solution

Bronkhorst High-Tech BV (the Netherlands), manufacturer of mass flow meters and controllers for gases and liquids, designed a new series of Vapour Delivery Modules. These compact sub-systems incorporate a (thermal or Coriolis) liquid flow controller, one or two mass flow controllers for carrier gas and a temperature controlled mixing and evaporation device. The modules are equipped with an 1.8” TFT display and push-buttons for local readout and control. The systems can also be operated via digital communication (RS232 or FLOW-BUS). Optionally, the units can be supplied with an additional mass flow controller for dilution and with local or remote trace heating temperature control. The compact, ‘plug and work’ modules can generate (saturated) vapor flows within the range of 100 sccm up to 10 SLM. The applied Controlled Evaporation Mixing (CEM) technology is suited for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.

VDM-Series vapourisers are ideally suited for vapour deposition and coating processes for the production of semiconductor chips, displays and solar cells. The modules can also be applied for the calibration of analytical devices such as gas chromatographs and mass spectrometers, and for humidification of fuel cells.