High Temperature Stackable Actuator

When actuators are used in high-temperature applications, sometimes as high as 350°C, the dynamic seals tend to become sticky and brittle over time. This increases the friction between the seal and the inner wall of the actuating system, impairing movement of the pistons. Similar difficulties are also encountered in solenoid valves in which the pistons are actuated using an electrical current. The degradation of the dynamic seals does not only occur in high temperature applications. The problem is also present in cryogenic applications, where valves are used in very low temperature conditions.

For some applications, it would also be desirable for this actuating mechanism to impart a higher force to the shaft or plunger it actuates, while keeping the actuating pressure low. For some applications, the mechanism would also need to have a long operating life and be able to move the shaft or plunger at high speed. Advantageously, the use of a deformable diaphragm in the actuating mechanism of the present invention eliminates the need for dynamic seals. Avoiding the use of conventional seals eliminates friction of parts within the actuator, increasing in turn the lifetime of the actuating mechanism, regardless of temperature conditions in which it is used.

In addition, the use of stackable actuating such as those from Analytical Flow Products (Canada) and/or biasing element cartridges allows modifying and controlling the torque and weight force applied on the actuating shaft, allowing easy customisation of the actuating mechanism depending on the requirements of the applications for which it is to be used. Finally different sizes and configurations could be done to address the needs of different markets. Atomic layer deposition valve is a typical application for this actuator.