Metal Sealed Digital Mass Flow Controller

Bronkhorst High-Tech B.V. (The Netherlands) manufactures metal sealed mass flow meters / controllers, designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. Now, as an alternative to traditional face seal fittings, optional downport connections (c-seal/w-seal) are offered to reduce mounting space, while facilitating installation and maintenance. Metal sealed mass flow meters/controllers can be supplied in ranges starting from 0.1…5 sccm up to 0.6…100 slm (based on N2) or even higher on request.

Todays instruments are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling time down to 500 msec). The main digital pcboard contains all of the general functions needed for measurement and control. The latest EL-FLOW® design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides free and easy-to-use configuration software tools. In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an optionally integrated interface board provides DeviceNet™, Profibus-DP®, Modbus-RTU or FLOW-BUS protocols.